Chinese Physics C > 2004, Vol. 28 > Issue(8): 893-897

Multilayer Polarizing Elements for Synchrotron Radiation Soft X-Ray Region

Institute of High Energy Physics,CAS,Beijing 100039,China2 Institute of Precision Optical Engineering,Department of Physics,Tongji University,Shanghai 200092,China

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Abstract：
Periodic multilayers of W/C and Mo/Si have been developed with magnetron sputtering technology.The parameters of period and thickness are adjusted so that the first Bragg peak appears at the Brewster angle when the photon energy is in the vicinity of K edge of carbon and L edge of silicon respectively.The experiment was implemented at Beijing Synchrotron Radiation Facility(BSRF).The reflectivities of multilayer Mo/Si and W/C can reach 32.3% at 89eV and 4.18% at 214eV respectively near the Brewster angle.The feasibility of setting up polarizer with multilayers is discussed in this paper.

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ZHU Jie, CUI Ming-Qi, ZHENG Lei, ZHAO Yi-Dong and WANG Zhan-Shan. Multilayer Polarizing Elements for Synchrotron Radiation Soft X-Ray Region[J]. Chinese Physics C, 2004, 28(8): 893-897.

ZHU Jie, CUI Ming-Qi, ZHENG Lei, ZHAO Yi-Dong and WANG Zhan-Shan. Multilayer Polarizing Elements for Synchrotron Radiation Soft X-Ray Region[J]. Chinese Physics C, 2004, 28(8): 893-897. shu

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Received: 2003-08-11
Revised: 1900-01-01

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通讯作者:陈斌, bchen63@163.com

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沈阳化工大学材料科学与工程学院沈阳 110142

Multilayer Polarizing Elements for Synchrotron Radiation Soft X-Ray Region

Corresponding author:CUI Ming-Qi,

Institute of High Energy Physics,CAS,Beijing 100039,China2 Institute of Precision Optical Engineering,Department of Physics,Tongji University,Shanghai 200092,China

Received Date:2003-08-11

Accepted Date:1900-01-01

Available Online:2004-08-05

Abstract:Periodic multilayers of W/C and Mo/Si have been developed with magnetron sputtering technology.The parameters of period and thickness are adjusted so that the first Bragg peak appears at the Brewster angle when the photon energy is in the vicinity of K edge of carbon and L edge of silicon respectively.The experiment was implemented at Beijing Synchrotron Radiation Facility(BSRF).The reflectivities of multilayer Mo/Si and W/C can reach 32.3% at 89eV and 4.18% at 214eV respectively near the Brewster angle.The feasibility of setting up polarizer with multilayers is discussed in this paper.

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Multilayer Polarizing Elements for Synchrotron Radiation Soft X-Ray Region

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通讯作者:陈斌, bchen63@163.com

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