Chinese Physics C > 1997, Vol. 21 > Issue(4): 304-310

The Nonlinear Enhancement Effect of Sputered Ag-atoms With FeCl⁺Bombardment

Institute of Nuclear Research.The Chinese Academy of Sciences,Shanghai 2018002 The Department of Physics,Shanghai University,Shanghai 2018003 Shanghai Applied Radiation Intitute,Shanghai University,Shanghai 201800

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Abstract：
Measurements of the angular distributions and yields of atoms sputtered from Ag target by bombardment with FeCl ⁺, ⁵⁶Fe ⁺and ³⁵Cl ⁺are reported.Large enhancement occurs in the measured Ag atom yield for FeCl ⁺projectile in comparison with the sum of the sputtering yields for ⁵⁶Fe ⁺and ³⁵Cl ⁺bombardment at same impact velocities.The enhanecment can be explained by a model of the thermal spike-evaporation plus surface topography effect.

References

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Wang Zhenxia, Wang Minmin, Zhu Fuying, Ji Guifang, Luo Wenyun, Li Xinnian and Wang Chuanshan. The Nonlinear Enhancement Effect of Sputered Ag-atoms With FeCl ⁺Bombardment[J]. Chinese Physics C, 1997, 21(4): 304-310.

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Received: 1900-01-01
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通讯作者:陈斌, bchen63@163.com

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沈阳化工大学材料科学与工程学院沈阳 110142

The Nonlinear Enhancement Effect of Sputered Ag-atoms With FeCl⁺Bombardment

Corresponding author:Wang Zhenxia,

Institute of Nuclear Research.The Chinese Academy of Sciences,Shanghai 2018002 The Department of Physics,Shanghai University,Shanghai 2018003 Shanghai Applied Radiation Intitute,Shanghai University,Shanghai 201800

Received Date:1900-01-01

Accepted Date:1900-01-01

Available Online:1997-04-05

Abstract:Measurements of the angular distributions and yields of atoms sputtered from Ag target by bombardment with FeCl⁺,⁵⁶Fe⁺and³⁵Cl⁺are reported.Large enhancement occurs in the measured Ag atom yield for FeCl⁺projectile in comparison with the sum of the sputtering yields for⁵⁶Fe⁺and³⁵Cl⁺bombardment at same impact velocities.The enhanecment can be explained by a model of the thermal spike-evaporation plus surface topography effect.

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The Nonlinear Enhancement Effect of Sputered Ag-atoms With FeCl⁺Bombardment

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