Chinese Physics C > 2005, Vol. 29 > Issue(4): 430-434

VUV/EUV Primary Standard Detector Facility and Transfer Detector Calibration

Institute of High Energy Physics,CAS,Beijing 100049,China2 National Synchrotron Radiation Laboratory Hefei 230029,China

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A transfer standard detector was calibrated for the fist time with respect to the vuv/euv primary standard detector built at the metrology beamline in national synchrotron radiation laboratory (nsrl) at wavelength 17.625nm, 6.8nm and 92nm. the repetitively calibrated quantum efficiencies for si photodiode are in good agreement at each wavelength with the relative accuracy of 1%–14%. but compared with the quantum efficiency from nist, our result has good agreement at wavelength 17.625nm while poor agreement at wavelength 6.8nm and 92nm. the stability of the light source and the spectral impurity has significant effect on calibration.

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ZHENG Lei, CUI Ming-Qi, ZHAO Yi-Dong, ZHU Jie, ZHOU Ke-Jin, CHEN Kai, ZHAO Jia, SUN Li-Juan, MA Chen-Yan, ZHOU Hong-Jun and HUO Tong-Lin. VUV/EUV Primary Standard Detector Facility and Transfer Detector Calibration[J]. Chinese Physics C, 2005, 29(4): 430-434.

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Received: 2004-07-07
Revised: 2004-10-18

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通讯作者:陈斌, bchen63@163.com

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沈阳化工大学材料科学与工程学院沈阳 110142

VUV/EUV Primary Standard Detector Facility and Transfer Detector Calibration

Corresponding author:ZHENG Lei,

Institute of High Energy Physics,CAS,Beijing 100049,China2 National Synchrotron Radiation Laboratory Hefei 230029,China

Received Date:2004-07-07

Accepted Date:2004-10-18

Available Online:2005-04-05

Abstract:A transfer standard detector was calibrated for the fist time with respect to the vuv/euv primary standard detector built at the metrology beamline in national synchrotron radiation laboratory (nsrl) at wavelength 17.625nm, 6.8nm and 92nm. the repetitively calibrated quantum efficiencies for si photodiode are in good agreement at each wavelength with the relative accuracy of 1%–14%. but compared with the quantum efficiency from nist, our result has good agreement at wavelength 17.625nm while poor agreement at wavelength 6.8nm and 92nm. the stability of the light source and the spectral impurity has significant effect on calibration.

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VUV/EUV Primary Standard Detector Facility and Transfer Detector Calibration

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