Chinese Physics C > 2012, Vol. 36 > Issue(4): 344-349 DOI: 10.1088/1674-1137/36/4/009

Analytical and simulation studies for diode and triode ion beam extraction systems

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This work is concerned with ion beam dynamics and compares the emittance to aberration ratios of two-and three-electrode extraction systems. The study is conducted with the aid of Version 7 of SIMION 3D ray-tracing software. The beam dependence on various parameters of the extraction systems is studied and the numerical results lead to qualitative conclusions.
Ion beam characteristics using diode and triode extraction systems are investigated with the aid of the computer code SIMION 3 D, Version 7.0. The diode (two electrode extraction system) and triode (three-electrode extraction, acceleration-deceleration system) extraction systems are designed and optimized with di erent geometric parameters of the electrode system, voltage applied to the extraction electrode, and plasma parameters inside the ion source chamber, as well as by the ion beam space charge. This work attempts to describe the importance of the acceleration-deceleration extraction system. It shows that besides an increase of the beam energy, the ion beam has lower emittance than the two-electrode extraction system. Ion beams of the highest quality are extracted whenever the half-angular divergence is minimum for which the perveance current intensity and the extraction gap have optimum value. Knowing the electron temperature of the plasma is necessary to determine plasma potential and the exact beam energy.

References

[1]

Spadtke P. In: The Physics and Technology of Ion Sources.Ed. Brown I G. New York: John Wiley, 20042 Dahl D A. SIMION 3D Version 7.0 User's Manual INEEL-95/0403. Idaho National Engineering and Environmental Laboratory, I D 83415, 20003 Turek M et al. Vacuum, 2005, 78: 649-6544 Thomason J W G et al. Proceedings of EPAC. Switzerland:Lucerne, 20045 Zelenak A, Bogomolov S L. Rev. Sci. Instrum., 2004, 75:16726 Langmuir I. Phys. Rev., 1913, 2: 4507 Septier A. Focusing of Charged Particles, Vol. II. New York:Academic Press, 19678 Dahl D A, Delmore J E, Appelhans A D. Rev. Sci. Instrum.,1990, 61: 6079 Winter H P. Production of Multiply Charged Heavy Ions,in Lecture notes in Physics, Vol. 83. Ed. Bethge K. Berlin:Springer, 1978, 2: 8010 Killer R. American Institute of Physics. Conf. Proceedings,1986, 139: 111 Killer R, Spadtke P, Hofmann K, Spring Ser. Electrophys.11, Heidelberg, 1983. 6912 Harrison E R. J. Applied Phys., 1958, 29: 90913 Pierce J R. Theory and Design of Electron Beams. London-Van Nostrand, 1949

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M. M. Abdelrahman, N. I. Basal and S. G. Zakhary. Analytical and simulation studies for diode and triode ion beam extraction systems[J]. Chinese Physics C, 2012, 36(4): 344-349. doi: 10.1088/1674-1137/36/4/009

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Received: 2011-06-27
Revised: 2011-07-25

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通讯作者:陈斌, bchen63@163.com

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沈阳化工大学材料科学与工程学院沈阳 110142

Analytical and simulation studies for diode and triode ion beam extraction systems

Received Date:2011-06-27

Accepted Date:2011-07-25

Available Online:2012-04-05

Abstract:This work is concerned with ion beam dynamics and compares the emittance to aberration ratios of two-and three-electrode extraction systems. The study is conducted with the aid of Version 7 of SIMION 3D ray-tracing software. The beam dependence on various parameters of the extraction systems is studied and the numerical results lead to qualitative conclusions.
Ion beam characteristics using diode and triode extraction systems are investigated with the aid of the computer code SIMION 3 D, Version 7.0. The diode (two electrode extraction system) and triode (three-electrode extraction, acceleration-deceleration system) extraction systems are designed and optimized with di erent geometric parameters of the electrode system, voltage applied to the extraction electrode, and plasma parameters inside the ion source chamber, as well as by the ion beam space charge. This work attempts to describe the importance of the acceleration-deceleration extraction system. It shows that besides an increase of the beam energy, the ion beam has lower emittance than the two-electrode extraction system. Ion beams of the highest quality are extracted whenever the half-angular divergence is minimum for which the perveance current intensity and the extraction gap have optimum value. Knowing the electron temperature of the plasma is necessary to determine plasma potential and the exact beam energy.

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Analytical and simulation studies for diode and triode ion beam extraction systems

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