Chinese Physics C > 2009, Vol. 33 > Issue(10): 866-869 DOI: 10.1088/1674-1137/33/10/009

Radiation response of pseudo-MOS transistors fabricated in hardenedfully-depleted SIMOX SOI wafers

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Abstract：

The total dose radiation response of pseudo-MOS transistors fabricated in hardened and unhardened FD (fully-depleted) SIMOX (Separation by Implanted Oxygen) SOI (Silicon-on-insulator) wafers is presented. At 1 Mrad(Si) radiation dose, the threshold voltage shift of the pseudo-MOS transistor is reduced from －115.5 to －1.9 V by the hardening procedure. The centroid location of the net positive charge trapped in BOX, the hole-trap density and the hole capture fraction of BOX are also shown. The results suggest that hardened FD SIMOX SOI wafers can perform well in a radiation environment.

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BI Da-Wei, ZHANG Zheng-Xuan, ZHANG Shuai, CHEN Ming, YU Wen-Jie, WANG Ru, TIAN Hao and LIU Zhang-Li. Radiation response of pseudo-MOS transistors fabricated in hardenedfully-depleted SIMOX SOI wafers[J]. Chinese Physics C, 2009, 33(10): 866-869. doi: 10.1088/1674-1137/33/10/009

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Received: 2008-12-22
Revised: 2009-01-22

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通讯作者:陈斌, bchen63@163.com

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沈阳化工大学材料科学与工程学院沈阳 110142

Radiation response of pseudo-MOS transistors fabricated in hardenedfully-depleted SIMOX SOI wafers

Corresponding author:BI Da-Wei,

Received Date:2008-12-22

Accepted Date:2009-01-22

Available Online:2009-10-05

Abstract:

The total dose radiation response of pseudo-MOS transistors fabricated in hardened and unhardened FD (fully-depleted) SIMOX (Separation by Implanted Oxygen) SOI (Silicon-on-insulator) wafers is presented. At 1 Mrad(Si) radiation dose, the threshold voltage shift of the pseudo-MOS transistor is reduced from －115.5 to －1.9 V by the hardening procedure. The centroid location of the net positive charge trapped in BOX, the hole-trap density and the hole capture fraction of BOX are also shown. The results suggest that hardened FD SIMOX SOI wafers can perform well in a radiation environment.

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Radiation response of pseudo-MOS transistors fabricated in hardenedfully-depleted SIMOX SOI wafers

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