Chinese Physics C > 2005, Vol. 29 > Issue(S1): 40-42

Phase Depth Profile in NiTi Shape Memory Alloy Films Made up from Sputter-Deposited Ni/Ti Multilayers

Institute of Physical Science and Technology,Lanzhou University,Lanzhou 730000,China2 Institute of High Energy Physics,CAS,Beijing 100049,China

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Abstract：
Phase depth profile in NiTi shape memory alloy films made up from sputter-deposited Ni/Ti multilayers is studied by Grazing-Incidence X-Ray Diffraction. Phase depth profile is not uniform in NiTi films. Both samples show there is a multiphase mixture region of Ti3Ni4 precipitates, martensite and a little of austenite near the free surface and a uniform Martensite phase near the substrate. Diffusion and reaction take place between film and substrate. Different periodical thickness will affect the phase depth profile in the after-annealing films.

References

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WEI Xiang-Jun, XU Qing, JIA Quan-Jie and WANG Huan-Hua. Phase Depth Profile in NiTi Shape Memory Alloy Films Made up from Sputter-Deposited Ni/Ti Multilayers[J]. Chinese Physics C, 2005, 29(S1): 40-42.

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Received: 2005-10-28
Revised: 1900-01-01

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沈阳化工大学材料科学与工程学院沈阳 110142

Phase Depth Profile in NiTi Shape Memory Alloy Films Made up from Sputter-Deposited Ni/Ti Multilayers

Corresponding author:WEI Xiang-Jun,

Institute of Physical Science and Technology,Lanzhou University,Lanzhou 730000,China2 Institute of High Energy Physics,CAS,Beijing 100049,China

Received Date:2005-10-28
Accepted Date:1900-01-01
Available Online:2005-01-02

Abstract:Phase depth profile in NiTi shape memory alloy films made up from sputter-deposited Ni/Ti multilayers is studied by Grazing-Incidence X-Ray Diffraction. Phase depth profile is not uniform in NiTi films. Both samples show there is a multiphase mixture region of Ti3Ni4 precipitates, martensite and a little of austenite near the free surface and a uniform Martensite phase near the substrate. Diffusion and reaction take place between film and substrate. Different periodical thickness will affect the phase depth profile in the after-annealing films.